日本 NITTO DENKO日东电工UM810半自动UV照射机解胶机

 

?Applicable wafer size 4“, 5”, 6“, 8”
?Applicable frame size for 6”, for 8”
?Applicable wafer size 4“, 5”, 6“
?Applicable frame size for 5”, for 6”
?Illuminance:
?UM810: 45mW/cm2 or more (Wafer area)
?UM110: 55mW/cm2 or more (Wafer area)
?UV lamp High pressure mercury lamp (Ozone less type)
?Dominant wave length 365nm
?Effective radiation length 250mm
?Dimension (W)630x(D)670x(H)990(mm)
?Weight approx. 120kg
?Semi automatic type UV irradiator
?Wafer mount frame loading and unloading are done manually
?Irradiation time range: 0 – 999sec.
?N2 pre-blow function
?UV illuminometer (Option)
?Irradiation area expand (to frame area) (Option)
?Support glass for irradiation to BG tape